| ‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘ KAWASAKI STEEL TECHNICAL REPORT No.29 ( November 1993 ) Special Issue on Iron Power ‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘‘ |
| Airflow Fields in Line-Type Cleanroom Tsutomu Fujita, Akira Sueda, Hitoshi Ura, Takeshi Shiraishi |
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Synopsis : Experiments and numerical simulations were conducted to improve the airflow fields in a line-type cleanroom. The outlet airflow from the air supply unit was first studied. The outlet airflow pattern was greatly improved in terms of uniformity by fitting flow passage-adjusting members. The influence on room airflow patterns was then investigated by varying the shape of air supply outlets. Several numerical simulations were also carried out. No rotating or rising streams were observed in the line-type cleanroom, and the airflow patterns were more unidirectional than with conventional non-unidirectional flow, so that dust and other contaminants could be more effectively removed with the airflow. The cleaning capability was very high, and it was possible to meet Class 100 (Federal Standard 209 D) with relatively simple equipment. |
| TextiPDF: 6p./330kbj |